Large Area Contact Profilometry

Custom  Contact Profilers

Truly custom profilers offer comprehensive measurement capabilities for mass production and research facilities that demand accuracy, performance and value.

Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions specifically for large square substrate larger than 300mm.

FP-10

A-Type: Head Stationary / Stage Moves

(up to 400mm x 500mm substrates)

For smaller scale applications where footprint and budgets are limited, the Toho FP-10 is the right choice for surface analysis. The original KLA-Tencor design with a moveable stage is utilized.Two lead screws (X andY) are used for location of a measurement point while the patented Micro Head & stylus is fixed over the stage. Accommodating various materials, shapes and rigidities, the FP-10 offers excellent versatility.

FP-20

X-Type: Head Moves / Stage is Stationary

(any substrate larger than 400mm x 500mm)

With larger glass panels, noise can be generated with sample handling. The X-type FP series resolves this issue with a moveable Micro Head.The granite measurement stage features an X axis and a gantry suspends the scanner with the Micro Head moving in theY axis.This structure allows for faster measurements with more reliable data at all points on a large area. FP-20’s are used at all major display fabs worldwide.

Specifications

Performance

Scan Repeatability
X and Y Repeatability Scan Length
Scan Speed
Sampling Rate Throat Height Vertical Range
L – Stylus
Stylus Force
Pattern Recognition Noise Isolator

Configuration

Sample Size (mm) A type Sample Size (mm) X type

   10Å for A type / 15Å for X type ± 2 μm
30 mm ~ 90mm with stress option 1μm / sec ~ 25mm / sec 50 / 100 / 200 / sec
15 mm 0 – 130 μm
2 μm / 60 degrees
0.5 mg – 15 mg Manual / Auto optional Equipped

up to 400mm x 500mm  Or any size larger than 400mm x 500mm

Applications

The Profilers are designed to provide accurate profile measurements within a vast array of applications:

• • Thin film heights

  • Thick film heights

  • Photo resist / soft films

  • Surface Roughness Characterization

  • Surface Curvature and form

  • 2D Stress on thin films

  • Peak to Valley Dimension analysis

  • 3D imaging

  • Flatness

  • Defect Analysis