CleanRoom
Wet-Processing
Single Wafer Spin Process
Automatic Spin Processors
Diffusion & Deposition
Annealing
Ion Sources
CVD Tools
Plasma Cleaning & Etching Systems
Bonders
Semiconductor Assembly Equipment
Processing Materials
Hermetic Package Sealing
Micro Abrasive Blasters
Reflow Solder Systems
Taping Equipment
Bond Testers
1. Thin Film Metrology
2. optical metrology tools for the characterization of thin and thick films
3. Sheet resistivity and CV Mapping system
4. Scanning acoustic microscope for nondestructive inspection of bonded wafers, packaged semiconductors and industrial products.
Protecting Sensitive Devices
Semiconductor Bonding Tools
DOPANTS for Diffusion Sources
Materials for Thin film