Optical Metrology Tools

Low cost R&D tool for film characterization - thickness, mapping & optical properties

Non-destructive characterization of coatings in the nano- and micro- scale Biosensors for PoN applications

Technology:

White Light Reflectance Spectroscopy (WLRS) that allows accurate and simultaneous measurement of thickness and refractive index of stacked thin and thick films in ultra-wide range from few Angstroms to millimeters.

Application:

Optical metrology tool for the characterization of single layer and multi-layer coatings for a wide range of diverse applications

  • semiconductors,
  • organic electronics,
  • polymers,
  • paints and coatings,
  • photovoltaics,
  • biosensing