CVD Tools
CVD Tools
Thin Film Wafer Processing Systems
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Deposition (ebeam, sputter, PECVD)
Etching (RIE)
Growth (ALD, PA-MOCVD)
Cleaning
Device Testing Systems for Space Simulation
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Thin Film Wafer Processing Systems
Deposition (ebeam, sputter, PECVD)
Etching (RIE)
Growth (ALD, PA-MOCVD)
Cleaning
Device Testing Systems for Space Simulation