PLASMA CLEANING SYSTEMS & OVENS

We provide advanced plasma processing systems engineered for precision, repeatability, and high-performance semiconductor manufacturing. Our portfolio covers direct plasma, indirect plasma, batch plasma, wafer plasma systems, and high-temperature process ovens, supporting a wide range of front-end and back-end semiconductor processes.

Industries & Applications

• Semiconductor manufacturing

• MEMS and sensors

• Advanced packaging

• Power electronics

• Research institutes and universities

• Electronics

• Automotive

• Medical and Life Science industries.