DOPANTS for Diffusion Sources

BoronPlus and PhosPlus are proven products routinely used in semiconductors production. Silicon reliability be converted to n-doping or p-doping by our superior control of the deposition process utilizing BoronPlus aand PhosPlus.

Our BoronPlus and PhosPlus planar diffusion sources offer a superior dopant system for safe, cost effective and reliable doping of silicon wafers. Combined with process quality yields their safe processing and non-hazards nature many foundries have converted to using these sources.


  • Analog
  • Bipolar
  • GBT
  • Micromachine
  • Opto-electronics
  • ASIC
  • CMOS
  • Power Transistor
  • Mixed Signals
  • MEMS