DOPANTS for Diffusion Sources

BoronPlus and PhosPlus are proven products routinely used in semiconductors production. Silicon reliability be converted to n-doping or p-doping by our superior control of the deposition process utilizing BoronPlus aand PhosPlus.

Our BoronPlus and PhosPlus planar diffusion sources offer a superior dopant system for safe, cost effective and reliable doping of silicon wafers. Combined with process quality yields their safe processing and non-hazards nature many foundries have converted to using these sources.


  • Analog

  • Bipolar

  • GBT

  • Micromachine

  • Opto-electronics

  • ASIC

  • CMOS

  • Power Transistor

  • Mixed Signals

  • MEMS